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Conference Paper
80nm T-Shaped Gate Metamorphic HEMTs Fabricated Using Two-Step Gate Recess Process
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- Authors
- Hyung Sup Yoon, Jae Yeob Shim, Dong Min Kang, Ju Yeon Hong, Kyung Ho Lee
- Issue Date
- 2006-09
- Citation
- International Conference on Solid State Devices and Materials (SSDM) 2006, pp.954-955
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Gate recess, T-shaped gate, Two-Step