상세정보
학술지
Fabrication of Nanoimprinted Curved Feature for Focusing Grating Coupler using Hydrogen Silsesquioxane Mold
- 발행일
- 200608
- 출처
- Current Applied Physics, v.6 no.1, pp.e121-e124
- ISSN
- 1567-1739
- 출판사
- Elsevier
- 협약과제
- 06MB3500, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발, 최창억
- 초록
- The nanoimprinted curved features for focusing grating coupler have been fabricated with hydrogen silsesquioxane mold. The minimum gap between the nanoimprinted curved features is 85 nm and the whole device size is 1 mm × 1 mm. The mold without anti-stiction coating did not cause the failure during separation process. The implemented optical device using nanoimprinted curved features have very small spot size and good output coupling efficient of 347 nm and 28.2%, respectively. © 2006 Elsevier B.V. All rights reserved.
- KSP 제안 키워드
- 5 nm, Anti-stiction coating, Device size, Hydrogen Silsesquioxane, Minimum gap, Optical devices, Output coupling, Spot size, grating coupler, separation process