ETRI-Knowledge Sharing Plaform

KOREAN
논문 검색
Type SCI
Year ~ Keyword

Detail

Journal Article Fabrication of Nanoimprinted Curved Feature for Focusing Grating Coupler using Hydrogen Silsesquioxane Mold
Cited 1 time in scopus Share share facebook twitter linkedin kakaostory
Authors
Ho Jun Ryu, Dong Woo Suh, Mun Cheol Paek
Issue Date
2006-08
Citation
Current Applied Physics, v.6, no.1, pp.e121-e124
ISSN
1567-1739
Publisher
Elsevier
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1016/j.cap.2006.01.023
Abstract
The nanoimprinted curved features for focusing grating coupler have been fabricated with hydrogen silsesquioxane mold. The minimum gap between the nanoimprinted curved features is 85 nm and the whole device size is 1 mm × 1 mm. The mold without anti-stiction coating did not cause the failure during separation process. The implemented optical device using nanoimprinted curved features have very small spot size and good output coupling efficient of 347 nm and 28.2%, respectively. © 2006 Elsevier B.V. All rights reserved.
KSP Keywords
5 nm, Anti-stiction coating, Device size, Hydrogen Silsesquioxane, Minimum gap, Optical devices, Output coupling, Spot size, grating coupler, separation process