상세정보
학술대회
MEMS Acoustic Sensor using PMN-PT Single Crystal Diaphragm
- 발행일
- 200610
- 출처
- Optomechatronic Actuators, Manipulation, and Systems Control (SPIE 6374), v.6374, pp.1-10
- 협약과제
- 06MB3100, 유비쿼터스 단말용 부품 모듈, 김종대
- 초록
- This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finite-element analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hinge diaphragm. And we fabricated the miniature condenser microphones with area of 1.5 mm × 1.5 mm. From the simulation and measurement results, we confirmed that the maximum displacements at the center of flexure hinge diaphragms are several hundred times, compared with flat diaphragms. Moreover, the miniature microphones have obtained -3 dB bandwidth of nearly 20 kHz by proper design of the flexure hinge diaphragms.
- KSP 제안 키워드
- 3-dB bandwidth, Acoustic Sensor, Condenser microphone, Highly sensitive, PMN-PT single crystal, Simulation and measurement, acoustic performance, finite element analysis(FEA), flexure hinge, measurement results