BROWSE
Detail
Conference Paper
MEMS acoustic sensor using PMN-PT single-crystal diaphragm
Cited 3 time in 
Share 
Share
- Authors
- Sung Q Lee, Hye Jin Kim, Kang Ho Park, Yong K. Hong, Kee S. Moon
- Issue Date
- 2006-10
- Citation
- Optomechatronic Actuators, Manipulation, and Systems Control (SPIE 6374), v.6374, pp.1-10
- Publisher
- SPIE
- Language
- English
- Type
- Conference Paper
- Abstract
- This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finite-element analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hinge diaphragm. And we fabricated the miniature condenser microphones with area of 1.5 mm × 1.5 mm. From the simulation and measurement results, we confirmed that the maximum displacements at the center of flexure hinge diaphragms are several hundred times, compared with flat diaphragms. Moreover, the miniature microphones have obtained -3 dB bandwidth of nearly 20 kHz by proper design of the flexure hinge diaphragms.
- KSP Keywords
- 3-dB bandwidth, Acoustic Sensor, Condenser microphone, Finite Element(FE), PMN-PT, Simulation and measurement, Single crystal, acoustic performance, finite-element analysis(FEA), flexure hinge, highly sensitive