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Conference Paper
High-Density Optical Disk Pattern Mastering Using Nanoimprint Lithography
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- Authors
- Choon Gi Choi
- Issue Date
- 2006-10
- Citation
- Nanotechnology Materials and Devices Conference (NMDC) 2006, pp.1-2
- Language
- English
- Type
- Conference Paper
- Abstract
- We demonstrated nanoimprint lithography for the high-density optical disk pattern mastering. The nickel electroplated optical disk patterns with pit lengths of ~105 nm, ~67 nm, and ~40 nm on the nanoimprinted optical disk patterns were successfully fabricated. Because of the advanced technology, it has great possibility that the next generation high-density optical disk will be manufactured by nanoimprint lithography mastering technology.