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학술지
Design and Fabrication of the Double-Sided Silicon Microstrip Sensor
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- 발행일
- 200610
- 출처
- Journal of the Korean Physical Society, v.49 no.4, pp.1401-1406
- ISSN
- 0374-4884
- 출판사
- 한국물리학회 (KPS)
- 협약과제
- 06MB1500, IT 융합기술인프라 구축, 구진근
- 초록
- Silicon sensors have been used in high energy physics, astrophysics, medical imaging, and many other fields, including industry, due to its good position resolution and its fast response. We have designed many types of silicon sensors on 6-inch masks, such as double-sided, single-sided, and diode sensors. We have researched and developed the double-sided silicon microstrip sensor for the first time in Korea. We understand the many characteristics of silicon microstrip sensors, such as the potential distribution, the electric field distribution, the leakage currents, and the capacitances, through process and device simulation programs. We optimized many fabrication process parameters and developed silicon microstrip sensors based on the simulation results. We compared the device simulation results with measurements of the electrical characteristics of the fabricated silicon microstrip sensors.
- KSP 제안 키워드
- Design and fabrication, Double-sided, Electric field distribution, High energy physics, Leakage current, Medical Imaging, Microstrip sensor, Position resolution, Process Parameters, Process and device simulation, Silicon sensors