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Conference Paper Characteristics of ZrAlO Films Deposited by Plasma Enhanced Atomic Layer Deposition

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Authors: Sun Jin Yun, Jung Wook Lim, Hyun Tak Kim

Issue Date: 2006-10

Citation: The Electrochemical Society (ECS) Meeting 2006, pp.1-2

Language: English

Type: Conference Paper

KSP Keywords: Plasma-enhanced atomic layer deposition

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