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학술지 High Negative Differential Resistance in Silicon Quantum Dot Metal-Insulator-Semiconductor Structure
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저자
박래만, 김상협, 맹성렬, 박성주
발행일
200610
출처
Applied Physics Letters, v.89 no.15, pp.1-3
ISSN
0003-6951
출판사
American Institute of Physics (AIP)
DOI
https://dx.doi.org/10.1063/1.2360888
협약과제
06MB4700, 차세대 고성능 광전자소자 및 스마트 생화학 센서 구현을 위한 IT-BT-NT 융합 핵심기술 개발, 맹성렬
초록
Metal-insulator-semiconductor structures, comprised of silicon quantum dot films grown by plasma-enhanced chemical vapor deposition, were fabricated on Si wafers. The devices showed a negative differential resistance, as a result of the resonant tunneling and the very high peak-to-valley current ratios of 2240 under illumination and 390 in the dark at room temperature, which are much higher than the corresponding values of other Si tunneling devices. The peak voltage was reduced down to 1.9 V by increasing the doping concentration of the wafer and reducing the device area. The structure shows promise for use in solid-state switch applications. © 2006 American Institute of Physics.
KSP 제안 키워드
Doping concentration, Metal-insulator-semiconductor(MIS), Metal-insulator-semiconductor structures, Negative differential resistance(NDR), Plasma-enhanced chemical vapor deposition(PECVD), Quantum Dot(QD), Resonant tunneling, Room-temperature, Si wafer, Silicon quantum dots, Solid-state switch