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A New Growth Method of ZnO Nano Structures using Sputter Machines without any Heat Treatment
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- Authors
- Doo Hyeb Youn, Sung Lyul Maeng, Sang Hyub Kim, Sang Hoon Lee, Sang Chul Lim, Chul Won Joo, Kwang Yong Kang
- Issue Date
- 2006-10
- Citation
- IEEE Sensors 2006, pp.1-2
- Publisher
- IEEE
- Language
- English
- Type
- Conference Paper
- Abstract
- New growth shapes of ZnO nano structure using radio-frequency sputter deposition are revealed for the first time. The effects of growth conditions, such as O 2 /Ar ratio and growth time and surface state of metal particles, on the growth shapes of ZnO are investigated. ZnO clusters grown at the surface of polycrystalline metal particles were found to be amorphous and polycrystalline structure. Crystallinity and preferred growth direction of ZnO promoted with increasing O 2 /Ar ratio and growth time. The atomic % of oxygen in ZnO increased and oxygen-excess occurred with increasing O 2 /Ar ratio and growth time. Two distinct ZnO shapes were observed at the surface of Cu/Ti/Si and Cu/Au/Si, but were not observed at the surface of Ti/Si.