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학술대회 Polymer Photonic Crystal Nano-Systems Fabricated by Nanoimprint Lithography
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저자
최춘기, 한영탁, 김진태
발행일
200610
출처
SICE-ICASE International Joint Conference 2006, pp.4893-4896
DOI
https://dx.doi.org/10.1109/SICE.2006.314807
협약과제
06SB1200, 나노 패턴 공정 및 나노 광소자 개발, 최춘기
초록
We applied the nanoimprint lithography to replicate two-dimensional photonic crystal slab waveguides with a triangular array of air-holes on polystyrene. The photonic band gap structures, calculated by the plane wave expansion technique, shows that 2-D polystyrene photonic crystal slabs have a complete small photonic band gaps between 0.49 and 0.51 for the TE-like modes. The fabrication process of 2-D polystyrene photonic crystal slab waveguides is reported. The dimensions of the fabricated line defected waveguide slab structures with a triangular array of air holes correspond well to those of the proposed structures. The nanoimprinted polymer photonic crystal slabs will be attractive candidates for the implementations of ultra-compact low cost photonic crystal nano-systems. © 2006 ICASE.
KSP 제안 키워드
Air holes, Low-cost, Photonic band gap structures, Photonic bandgap(PBG), Photonic crystal slab, Polymer photonic crystal, Slab waveguide, Triangular array, Two-dimensional photonic crystals(2D PhCs), Waveguide slab, fabrication process