상세정보
학술지
New Growth Method of ZnO Nanostructures Using Sputter Machines without Heat Treatment
- 발행일
- 200611
- 출처
- Japanese Journal of Applied Physics, v.45 no.11, pp.8957-8960
- ISSN
- 0021-4922
- 출판사
- Japan Society of Applied Physics (JSAP), Institute of Physics (IOP)
- 협약과제
- 05MB4900, 차세대 고성능 광전자소자 및 스마트 생화학 센서 구현을 위한 IT-BT-NT 융합 핵심기술 개발, 맹성렬
- 초록
- New shapes of ZnO nanostructures formed using radio-frequency sputter deposition are revealed for the first time. The effects of growth conditions, such as O2/Ar ratio, growth time and metal surface, on the shapes of ZnO are investigated. ZnO clusters grown on the surface of polycrystalline metal particles were found to be amorphous and had polycrystalline structures. The crystallinity and preferred growth direction of ZnO were promoted with increasing O2/Ar ratio and growth time. The atomic percent of oxygen in ZnO increased and oxygen excess occurred with increasing O2/Ar ratio and growth time. Two distinct ZnO shapes were observed on Cu/Ti/Si and Cu/Au/Si surfaces, but were not observed on Ti/Si surface. © 2006 The Japan Society of Applied Physics.
- KSP 제안 키워드
- Applied physics, Growth conditions, Growth method, Metal particle, Oxygen excess, Preferred growth direction, Radio Frequency(RF), Si surface, ZnO nanostructures, growth time, heat treatment