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학술대회 Design and Development of AC-Coupled Singlesided Silicon Strip Sensor
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저자
가동하, 배재범, 현효정, 강동희, 김현정, 박환배, 박종문, 박건식
발행일
200610
출처
IEEE Nuclear Science Symposium Conference Record 2006, pp.451-454
DOI
https://dx.doi.org/10.1109/NSSMIC.2006.356195
협약과제
06ZB1100, 반도체 Foundry 운영사업, 김보우
초록
Semiconductor detectors, and in particular silicon detectors, have unique properties that make them very suitable for the detection of ionizing radiation. We reported the design and development processes of the DC-type double-sided silicon strip sensor in the 2005 Nuclear Science Symposium. In this meeting we present the design and development of the single-sided silicon strip sensor which has coupling capacitors and bias resistors. The silicon sensor concept, details of the sensor design and fabrication processes are presented and the measurement results of the electrical characteristics of the fabricated sensors are also reported. ©2006 IEEE.
KSP 제안 키워드
DC-type, Design and development processes, Design and fabrication, Double-sided, Ionizing radiation(IR), Sensor design, Silicon detector, Silicon sensors, Single-sided, electrical characteristics, fabrication process