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Conference Paper
1.5 μm InAlGaAsllnP VCSELs with A1203 Embedded Apertures
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- Authors
- Hyun Woo Song, Won Seok Han, Jong Deog Kim, Jong Hee Kim, Sang Hee KoPark
- Issue Date
- 2006-10
- Citation
- IEEE Lasers and Electro-Optics Society (LEOS) Meeting 2006, pp.444-445
- Publisher
- IEEE
- Language
- English
- Type
- Conference Paper
- Abstract
- We report inAlGaAs VCSELs with Al2O3 embedded apertures. Using atomic layer deposition, the current confinement apertures are fabricated by depositing of Al2O3 on air-gap surfaces of undercut apertures. 1.57 μm VCSELs showing the output power of over 1 mW and direct modulation at 4 Gbit/s are reported using these apertures. © 2006 IEEE.
- KSP Keywords
- Air-gap, Atomic Layer Deposition, Direct modulation, Output power, current confinement