상세정보
학술지
Micromachined Air-Gap Structure MEMS Acoustic Sensor using Reproducible High-Speed Lateral Etching and CMP Process
- 발행일
- 200608
- 출처
- Journal of Micromechanics and Microengineering, v.16 no.10, pp.2071-2076
- ISSN
- 0960-1317
- 출판사
- Institute of Physics (IOP)
- 협약과제
- 06MB3200, 유비쿼터스 건강관리용 모듈 시스템, 박선희
- 초록
- This paper presents a micromachined air-gap structure microelectromechanical systems (MEMS) acoustic sensor, which is fabricated via assisted high-speed lateral etching and chemical mechanical polishing (CMP). A sandwich structure (LTO/P2O5/LTO) as a sacrificial layer for the releasing process is proposed to produce an air-gap structure MEMS acoustic sensor. This sandwich structure can be etched selectively in a specific patterned P2O5 layer. In addition, the sandwich structure proved superior to using only low temperature oxide (LTO) layer for the releasing process. We confirmed that the proposed releasing method assisted by lateral etching and CMP is very effective for creating a clean air-gap cavity in MEMS devices. In this work, the air-gap structure MEMS acoustic sensor is based on the capacitance change of a movable thin poly-silicon membrane. A high-gain impedance converter was mounted on a printed circuit board (PCB) with a silicon MEMS acoustic sensor to transform the electrical signal for input acoustic pressure. The membrane size of the MEMS acoustic sensor was 1.5 × 1.5 mm2. The sensitivity achieved was about 0.018-5.17 mV Pa-1. The noise level of the fabricated device was 10 館V Pa-1. © 2006 IOP Publishing Ltd.