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학술지 Vertically Well-Aligned ZnO Nanowires on C-Al2O3 and GaN Substrates by Au Catalyst
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저자
박현규, 오명훈, 김상우, 김길호, 윤두협, 이선영, 김상협, 김기출, 맹성렬
발행일
200612
출처
ETRI Journal, v.28 no.6, pp.787-789
ISSN
1225-6463
출판사
한국전자통신연구원 (ETRI)
DOI
https://dx.doi.org/10.4218/etrij.06.0206.0138
협약과제
05MB4900, 차세대 고성능 광전자소자 및 스마트 생화학 센서 구현을 위한 IT-BT-NT 융합 핵심기술 개발, 맹성렬
초록
In this letter, we report that vertically well-aligned ZnO nanowires were grown on GaN epilayers and c-plane sapphire via a vapor-liquid-solid process by introducing a 3 nm Au thin film as a catalyst. In our experiments, epitaxially grown ZnO nanowires on Au-coated GaN were vertically well-aligned while nanowires normally tilted from the surface when grown on Au-coated c-Al 2O3 substrates. However, pre-growth annealing of the Au thin layer on c-Al2O3 resulted in the growth of well-aligned nanowires in a normal surface direction. High-resolution transmission electron microscopy measurements showed that the grown nanowires have a hexagonal c-axis orientation with a single-crystalline structure.
KSP 제안 키워드
Au catalyst, Au thin film, Crystalline structure, Epitaxially grown, GaN substrate, Single-crystalline, Transmission Electron Microscopy(TEM), Vapor-liquid-solid process, Well-aligned, ZnO nanowire, aligned nanowires