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Conference Paper High-K Nano-Composite ZrO2/Al2O3 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
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Authors
Sun Jin Yun, Jung Wook Lim, Hyun Tak Kim
Issue Date
2006-12
Citation
International Conference on Nano Science and Nano Technology (GJ-NST) 2009, pp.1-25
Language
English
Type
Conference Paper
KSP Keywords
High-K, Nano composite, Plasma-enhanced atomic layer deposition
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