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Conference Paper
Replication technology as a means of implementing polymer MOEMS
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- Authors
- Jin Tae Kim, Jung Jin Ju, Suntak Park, Seung Koo Park, Min-Su Kim, Hyung-Jong Lee, Myung-Hyun Lee
- Issue Date
- 2007-01
- Citation
- Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII (SPIE 6462), v.6462, pp.1-7
- Publisher
- SPIE
- Language
- English
- Type
- Conference Paper
- Abstract
- Replication technologies have been recommended as an alternative means of high volume manufacturing of the polymer optical components with low-cost. We demonstrated replication technology as a means of implementing polymer-based MOEMS. To achieve this, a polymer optical bench with embedded electric circuits was designed to integrate the functional planar-lightwave-circuit (PLC)-type optical waveguide devices; the designed packaging structures were realized using a novel fabrication process that incorporated the UV imprint technique. In addition, the detail fabrication steps of the UV imprint process were investigated. The optical bench has v-grooves for the fiber ribbon and the alignment pits for opoelectronic interconnection. The plastic mold for imprinting the designed optical bench was made of UV-transparent perfluorinated polymer material. The designed optical bench was configured on the electric-circuit-patterned silicon substrate. Flip-chip bonded polymer optical waveguide device showed not only a good electric contact but also a coupling loss of 0.9 dB at a wavelength of 1.5 μm. It was concluded that replication technology has versatile application capabilities in manufacturing next generation optical interconnect systems.
- KSP Keywords
- Coupling loss, Electric circuit, Electric contact, Fabrication process, Flip-chip(FC), Low-cost, Optical Components, Optical Interconnects, Optical waveguide device, Perfluorinated polymer, Plastic mold