상세정보
학술대회
Replication Technolgoy as a means of Implementing the Polymer MOEMS
- 발행일
- 200701
- 출처
- Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII (SPIE 6462), v.6462, pp.1-7
- 협약과제
- 06MB3700, 휴대 단말기용 나노 플렉시블 광전배선 모듈, 이명현
- 초록
- Replication technologies have been recommended as an alternative means of high volume manufacturing of the polymer optical components with low-cost. We demonstrated replication technology as a means of implementing polymer-based MOEMS. To achieve this, a polymer optical bench with embedded electric circuits was designed to integrate the functional planar-lightwave-circuit (PLC)-type optical waveguide devices; the designed packaging structures were realized using a novel fabrication process that incorporated the UV imprint technique. In addition, the detail fabrication steps of the UV imprint process were investigated. The optical bench has v-grooves for the fiber ribbon and the alignment pits for opoelectronic interconnection. The plastic mold for imprinting the designed optical bench was made of UV-transparent perfluorinated polymer material. The designed optical bench was configured on the electric-circuit-patterned silicon substrate. Flip-chip bonded polymer optical waveguide device showed not only a good electric contact but also a coupling loss of 0.9 dB at a wavelength of 1.5 μm. It was concluded that replication technology has versatile application capabilities in manufacturing next generation optical interconnect systems.
- KSP 제안 키워드
- Coupling loss, Electric contact, High-volume manufacturing, Low-cost, Optical Interconnect(OI), Optical waveguide device, Perfluorinated polymer, Plastic mold, Polymer materials, Polymer optical waveguide, Silicon substrate