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학술지 Optimization of High Responsivity Waveguide Photodiode with a Thin Absorption Layer
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저자
박정우, 고현성, 심은덕, 백용순
발행일
200702
출처
Applied Physics Letters, v.90 no.9, pp.1-3
ISSN
0003-6951
출판사
American Institute of Physics (AIP)
DOI
https://dx.doi.org/10.1063/1.2709944
협약과제
06MB2800, 실리콘 기반 초고속 광인터커넥션 IC, 김경옥
초록
The optimization of a waveguide photodiode (WGPD) having a thin absorption layer is discussed. With an absorption layer thickness of less than 0.1 μm, responsivity of 1.09 AW was achieved for lensed-fiber coupling. For flat-ended fiber coupling, responsivity of 0.93 AW was achieved. An absorption layer thickness of more than 100 횇 is required for high responsivity and low polarization dependency. A formula for frequency response in a WGPD with a thin absorption layer is also obtained. This formula gives the optimized WGPD structure for high speed operation with high responsivity. © 2007 American Institute of Physics.