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학술지 O/E Integration of Polymer Waveguide Devices by Using Replication Technology
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저자
김진태, 주정진, 박선택, 이명현
발행일
200703
출처
IEEE Journal of Selected Topics in Quantum Electronics, v.13 no.2, pp.177-184
ISSN
1077-260X
출판사
IEEE
DOI
https://dx.doi.org/10.1109/JSTQE.2006.887149
협약과제
06MB3700, 휴대 단말기용 나노 플렉시블 광전배선 모듈, 이명현
초록
The simple optoelectronic integration of polymer-based optical waveguide devices and the development of the realization processes have been critical issues for cost-effective, high-volume manufacturing of a next-generation optoelectronic integrated circuit (OEIC). We demonstrated the replication technology as a means of implementing the polymer microoptoelectromechanical system (MOEMS)-based packaging structure providing the optical/electrical (O/E) integration of the functional polymer waveguide device. To achieve this, a micromechanical packaging structure consisting of an electric-circuit-embedded polymer optical bench and planar-lightwavecircuit (PLC)-type waveguide chip with alignment microstructure was designed, and the realization process incorporating the UV imprint technique was investigated. To improve optical coupling efficiency, the electric circuit was embedded under the optical bench and the contact pads were opened at the bottom of the alignment pits. In addition, a conductive adhesive-fill space was created at the alignment pits to accommodate the surplus conductive adhesive. Efficient fiber-chip coupling and good electrical contact of upside-down mounted single-mode waveguide chip was accomplished by the simple joining of the electric-circuit patterned micropedestals on the waveguide chip and the alignment pits on the bench. A coupling loss of 0.9 dB per coupling face was measured with a single-mode fiber at a wavelength of 1.5 μm. It was concluded that the replication technology has versatile application capabilities in manufacturing next generation optical interconnect systems. © 2007 IEEE.
KSP 제안 키워드
Coupling loss, Critical issues, Functional polymer, High-volume manufacturing, Microoptoelectromechanical system(MOEMS), Next-generation, Optical Interconnect(OI), Optical coupling efficiency, Optical waveguide device, Optoelectronic integration, Packaging structure