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Journal Article High-Resolution Electrohydrodynamic Jet Printing for the Direct Fabrication of 3D Multilayer Terahertz Metamaterial of High Refractive Index
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Authors
Hadi Teguh Yudistira, Ayodya Pradhipta Tenggara, Sang Soon Oh, VuDat Nguyen, Muhan Choi, Choon-gi Choi, Doyoung Byun
Issue Date
2015-04
Citation
Journal of Micromechanics and Microengineering, v.25, no.4, pp.1-9
ISSN
0960-1317
Publisher
Institute of Physics (IOP)
Language
English
Type
Journal Article
DOI
https://dx.doi.org/10.1088/0960-1317/25/4/045006
Abstract
The fabrication of 3D metamaterials, such as multilayer structures, is of great interest in practical applications of the metamaterial. Here we present an electrohydrodynamic jet printing technique as a direct fabrication method of 3D multilayer metamaterial. By alignment of the nozzle movement, we could fabricate multiple layers of the metamaterial. Controlling an electrical pulse to make droplets on-demand, we fabricated a high refractive index metamaterial and compared the optical performances of a single layer and multiple layers, with 10 μm width and 5 μm gap of I-shaped meta-atoms on the polyimide substrate. The peak refractive index was 25.7 at 0.46 THz for a four-layer metamaterial.
KSP Keywords
3D metamaterials, D Multilayer, Direct fabrication, Electrical pulse, Electrohydrodynamic jet printing, Fabrication method, Four-layer, High refractive index, High resolution, Meta-atoms, On-demand