상세정보
학술지
Air-suspended Two-dimensional Polymer Photonic Crystal Slab Waveguides Fabricated by Nanoimprint Lithography
- 발행일
- 200705
- 출처
- Applied Physics Letters, v.90 no.22, pp.1-3
- ISSN
- 0003-6951
- 출판사
- American Institute of Physics (AIP)
- 협약과제
- 07SB1200, 나노 패턴용 스탬퍼 가공기술 개발, 최춘기
- 초록
- Air-suspended membrane-type photonic crystals were fabricated in polystyrene. The two-dimensional photonic crystal slab nanostructures were replicated by a thermal nanoimprint process, and then air-suspended membrane structures were generated by a selective sacrificial layer etch process. The optical transmission showed clear band gap characteristics at 1550 nm wavelength, which is in good agreement with the theoretical calculations. © 2007 American Institute of Physics.
- KSP 제안 키워드
- 1550 nm, Band gap, Membrane structures, Photonic crystal slab, Polymer photonic crystal, Sacrificial layer, Slab waveguide, Suspended membrane, Theoretical calculation, Two-dimensional photonic crystals(2D PhCs), nanoimprint lithography