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학술대회 40 Gbps Electroabsorption Modulated DFB Laser with Tilted Facet Formed by Dry Etching
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저자
최중선, 권용환, 심재식, 김성복, 이명현
발행일
200705
출처
International Conference on Indium Phosphide and Related Materials (IPRM) 2007, pp.267-270
DOI
https://dx.doi.org/10.1109/ICIPRM.2007.381175
협약과제
06MB2100, 40G 모듈, 이명현
초록
We fabricated electroabsorption modulated distributed feedback (DFB) laser diodes for 40 Gbps application through selective-area growth method. The facet reflection was not sufficiently removed by just depositing antireflection coating on the as-cleaved facet and low frequency resonance occurred by optical feedback from facet to DFB laser. Tilted facet formed by dry etching processes successfully reduced the optical feedback and the resonance in E/O response decreased to as small as 2.8 dB. © 2007 IEEE.
KSP 제안 키워드
As 2, Distributed feedback (DFB) laser, Dry etching processes, Growth method, Laser diode(LD), Selective area growth, antireflection coating, low-frequency, optical feedback