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- 발행일
- 200705
- 출처
- 센서학회지, v.16 no.3, pp.174-178
- ISSN
- 1225-5475
- 출판사
- 한국센서학회
- 협약과제
- 07MB2600, 유비쿼터스 단말용 부품 모듈, 김종대
- 초록
- This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finite-element analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hingediaphragm. And we fabricated the miniature condenser microphones with area of 1.5 m×1.5 m. From the simulationtimes, compared with flat diaphragms. The sensitivities of fabricated miniature microphones are about 12.87V/Pa at1 kHz under a low bias voltage of 1 V, and the frequency response is flat upto 13 kHz.
- KSP 제안 키워드
- Condenser microphone, Frequency response(FreRes), Highly sensitive, Low bias, acoustic performance, bias voltage, finite element analysis(FEA), flexure hinge