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힌지구조를 갖는 초소형 콘덴서 마이크로폰
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- Issue Date
- 2007-05
- Citation
- 센서학회지, v.16, no.3, pp.174-178
- ISSN
- 1225-5475
- Publisher
- 한국센서학회
- Language
- Korean
- Type
- Journal Article
- Abstract
- This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finite-element analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hingediaphragm. And we fabricated the miniature condenser microphones with area of 1.5 m×1.5 m. From the simulationtimes, compared with flat diaphragms. The sensitivities of fabricated miniature microphones are about 12.87V/Pa at1 kHz under a low bias voltage of 1 V, and the frequency response is flat upto 13 kHz.