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Conference Paper Effect of Post-Annealing Temperatures on SnO2/Al2O3 Superlattice Thin Fiim Transistors Grown by Atomic Layer Deposition
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Authors
Hwan-Jae Lee, Seong-Deok Ahn, Seung-Youl Kang, Jin-Seong Park
Issue Date
2015-11
Citation
International Conference on Advanced Electromaterials (ICAE) 2015, pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
Annealing temperature, Atomic Layer Deposition, Post-annealing
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