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Conference Paper
Growth Characteristics and Electrical Properties of Aluminum Oxide and Tin Oxide Superlattice Thin Films by Atomic Layer Deposition
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- Authors
- Jeong-Mu Lee, Seung-Youl Kang, Seong-Deok Ahn
- Issue Date
- 2015-11
- Citation
- International Conference on Advanced Electromaterials (ICAE) 2015, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Atomic Layer Deposition, Electrical properties, Growth characteristics, Superlattice thin films, Tin Oxide, aluminum oxide, thin film(TF)