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Conference Paper
The Formation of Silicon Quantum Dots in Silicon Nitride Film based on the Gas Mixture of SiH4/N2 AND SiH4/NH3
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- Authors
- Tae-Youb Kim, Chel-Jong Choi, Nae-Man Park, Moon Gyu Jang, Yark Yeon Kim, Myung Sim Jun, Chang-Guen Ahn, Chul Huh, Gun Yong Sung, Seong-Jae Lee
- Issue Date
- 2007-07
- Citation
- International Conference on Surfaces, Coatings and Nanostructured Materials (NanoSMat) 2007, pp.322-323
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Gas mixture, Quantum Dot(QD), Silicon nitride film, Silicon quantum dots