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Journal Article
Infrared Focal Plane Array 용 MEMS 구조체 개발
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- Issue Date
- 2007-08
- Citation
- 전기학회논문지, v.56, no.8, pp.1461-1465
- ISSN
- 1975-8359
- Publisher
- 대한전기학회 (KIEE)
- Language
- Korean
- Type
- Journal Article
- Abstract
- A micromachined sensor part for an infrared focal plane array has been designed and fabricated. Amorphous silicon was adapted as a sensing material, and silicon nitride was used as a membrane material. To get a good efficiency of infrared absorption, the sensor was made as a λ/4 cavity structure. All the processes were done in 0.5 ㎛ iMEMS fab. in the Electronics and Telecommunication Research Institute (ETRI). The processed MEMS sensor structure had a small membrane deflection less than 0.3 ㎛. This excellent deflection property can be attributed to the rigorous balancing of the stresses of individual layers. The efficiency of infrared absorption was more than 75% in the wavelength range 8 - 14 ㎛.
- KSP Keywords
- Cavity structure, Infrared Focal Plane Array(IRRPA), MEMS sensor, Membrane deflection, Membrane material, Micromachined sensor, Research institute, Sensing material, Silicon Nitride, amorphous silicon, infrared absorption