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Conference Paper Er Doped Silicon-rich-silicon Nitride(SRSN) Microdisk
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Authors
Jee Soo Chang, Shin Young Lee, Jung H. Shin, Jae-Heon Shin, Gun Yong Sung
Issue Date
2007-08
Citation
Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2007, pp.1-2
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.1109/CLEOPR.2007.4391627
Abstract
Two types of Er doped silicon-rich silicon nitride(SRSN) based microdisks were fabricated. Optical property such as quality factors and emission spectrum were measured by using tapered fiiber.
KSP Keywords
Er-doped, Quality-factor(Q-factor), Silicon-rich silicon nitride, doped silicon, emission spectrum, optical properties