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Conference Paper Vanadium Dioxide Films Deposited on SiO2- and Al2O3-coated Si Substrates Using Reactive RF-Magnetron Sputter Deposition Technique
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Authors
Sun Jin Yun, Jung Wook Lim, Byung-Gyu Chae, Hyun-Tak Kim
Issue Date
2007-09
Citation
International Conference on Solid State Devices and Materials (SSDM) 2007, pp.564-565
Language
English
Type
Conference Paper