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Conference Paper Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD
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Authors
Young Sam Park, Jung Wook Lim, Woo Seok Yang, Seung Yun Lee, Sung Min Yoon, Byoung Gon Yu
Issue Date
2007-10
Citation
The Electrochemical Society (ECS) Meeting 2007 (212th), pp.1-1
Publisher
Electrochemical Society (ECS)
Language
English
Type
Conference Paper
KSP Keywords
stress reduction