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Conference Paper Stress Reduction of Ge2Sb2Te5 Crystallization by Capping Al2O3 Film Grown by PEALD

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Authors: Young Sam Park, Jung Wook Lim, Woo Seok Yang, Seung Yun Lee, Sung Min Yoon, Byoung Gon Yu

Issue Date: 2007-10

Citation: The Electrochemical Society (ECS) Meeting 2007 (212th), pp.1-1

Publisher: Electrochemical Society (ECS)

Language: English

Type: Conference Paper

KSP Keywords: stress reduction

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