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학술대회 A Miniature Condenser Microphone for Portable Terminals Applications
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김혜진, 이재우, 이성규, 이상균, 박강호
SENSORS 2007, pp.788-791
07MB2600, 유비쿼터스 단말용 부품 모듈, 김종대
This paper presents a miniature condenser microphone with a flexure hinge diaphragm for portable terminals applications. MEMS technology has been successfully applied to miniature silicon capacitive microphones, and we fabricated the smallest condenser silicon microphone in the presented reports. We used the finiteelement analysis (FEA) to evaluate mechanical and acoustic performances of the condenser microphone with a flexure hinge diaphragm. From the simulation results, we confirmed that the sensitivity of a flexure hinge diaphragm can be improved about 285 times higher than a flat diaphragm. The first and second modes occurred at 15,637Hz and 24,387Hz, respectively. The areas of the miniature condenser microphones with a hinge diaphragm are 1.5 mm × 1.5 mm. We measured the impedance characteristics and sensitivities of the fabricated condenser microphones. The sensitivities of microphones are around 12.87 μV/Pa (-60 dB ref. 12.5 mV/Pa) at 1 kHz under a low bias voltage of 1 V, and the frequency response is flat up to 13 kHz. © 2007 IEEE.
KSP 제안 키워드
Condenser microphone, Frequency response(FreRes), Impedance characteristic, Low bias, MEMS Technology, Silicon microphone, bias voltage, flexure hinge, simulation results