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Temperature-Dependent Dielectric Properties for (Ba,Sr)TiO3 Graded Thin Films on MgO (001) Substrate Grown by Pulsed Laser Deposition
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- 발행일
- 200710
- 출처
- Journal of the Korean Physical Society, v.51, pp.S166-S169
- ISSN
- 0374-4884
- 출판사
- 한국물리학회 (KPS)
- 협약과제
- 07MB2600, 유비쿼터스 단말용 부품 모듈, 김종대
- 초록
- Oriented (Ba0.6,Sr0.4)TiO3 (BST60) and graded (Ba,Sr)TiO3 (BST) films were deposited on MgO (001) single crystals by using a pulsed laser deposition method. Structural properties of the films were investigated by using an X-ray diffractometer. The dielectric properties of the films were investigated under a dc bias field of 0 - 20 V in the temperature region from 173 to 393 K by using interdigital capacitors (IDC) fabricated by photolithography and an etching process. The temperature-dependent small-signal dielectric properties of the films were measured with a Keithley 590 C-V meter. The measured temperature-dependent tunability for an IDC device based on BST60/MgO, BT/쨌쨌/ST/MgO and ST/쨌쨌/BT/MgO multilayer structure showed interesting data. The trends of the dielectric properties of the IDC may be due to the fact that they are affected by Curie temperature, lattice constant, strain/stress, etc.
- KSP 제안 키워드
- Computer Vision(CV), Curie temperature, DC bias field, Dielectric properties, Etching process, Graded thin films, Interdigital capacitors, Lattice constants, Pulsed laser deposition method, Pulsed-laser deposition(PLD), Single crystal