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학술대회 A Bidirectional Readout Integrated Circuit (ROIC) with Capacitance-to-Time Conversion Operation for High Performance Capacitive MEMS Accelerometers
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이성식, 이명래, 정성혜, 제창한, 박지만, 황건, 최창억
SENSORS 2007, pp.288-291
08MB1900, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발, 최창억
In this paper, a bidirectional readout integrated circuit (ROIC) with capacitance-to-time conversion operation has been proposed and demonstrated for high performance capacitive Micro-Electro-Mechanical System (MEMS) accelerometers, which is implemented by a 0.35-μm CMOS EEPROM process. For the desired performance of the proposed ROIC, a bidirectional time-to-digital conversion (TDC) method with a capacitance-to-time (C-T) conversion operation is employed for the detection of the directions. At the condition of the reference capacitance (CRef.) of 20pF, the new ROIC shows the positive sign-bit ('1') for the case of the sensor capacitance (CSen.) < 20-pF and the negative sign-bit ('0') for the case of CSen. > 20pF, which lead to the bidirectional accelerometer operation. Consequently, the new proposed ROIC exhibits the bidirectional readout operation by the bidirectional TDC operation with the C-T conversion. © 2007 IEEE.
KSP 제안 키워드
Capacitive MEMS, Computed tomography(C.T), High performance, MEMS accelerometers, Micro-electro-mechanical system(MEMS), Readout integrated circuit, conversion operation, time-to-digital conversion(TDC)