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Conference Paper
Fabrication of Two-Layer stacked Poly-Si TFT CMOS Inverters Using Laser Crystallized channel with metal gate on Si Substrate
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- Authors
- Soon-Young Oh, Chang-Geun Ahn, Jong-Heon Yang, Woo-Hyun Lee, Won-Ju Cho, Moon-Gyu Jang
- Issue Date
- 2007-09
- Citation
- International Conference on Solid State Devices and Materials (SSDM) 2007, pp.222-223
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- CMOS Inverter, Laser crystallized channel, Metal gate, Poly-Si TFT, Polycrystalline silicon(poly-Si), Si substrate