ETRI-Knowledge Sharing Plaform

KOREAN
논문 검색
Type SCI
Year ~ Keyword

Detail

Conference Paper Fabrication of Two-Layer stacked Poly-Si TFT CMOS Inverters Using Laser Crystallized channel with metal gate on Si Substrate
Cited - time in scopus Download 1 time Share share facebook twitter linkedin kakaostory
Authors
Soon-Young Oh, Chang-Geun Ahn, Jong-Heon Yang, Woo-Hyun Lee, Won-Ju Cho, Moon-Gyu Jang
Issue Date
2007-09
Citation
International Conference on Solid State Devices and Materials (SSDM) 2007, pp.222-223
Language
English
Type
Conference Paper
Project Code
07ZB1200, Future Technology Researches in the Fields of Informations and Telecommunications, Taehyoung Zyung
KSP Keywords
CMOS Inverter, Laser crystallized channel, Metal gate, Poly-Si TFT, Polycrystalline silicon(poly-Si), Si substrate