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학술대회
Fabrication of Two-Layer stacked Poly-Si TFT CMOS Inverters Using Laser Crystallized channel with metal gate on Si Substrate
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- 발행일
- 200709
- 출처
- International Conference on Solid State Devices and Materials (SSDM) 2007, pp.222-223
- 협약과제
- 07ZB1200, 정보통신미래신기술연구사업, 정태형
- KSP 제안 키워드
- CMOS inverters, Laser crystallized channel, Metal gate, Poly-Si TFT, Polycrystalline silicon(poly-Si), Si substrate