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Journal Article Characteristics of Nanocomposite ZrO2/Al2O3 Films Deposited by Plasma-Enhanced Atomic Layer Deposition

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Authors: Sun Jin Yun, Jung Wook Lim, Hyun-Tak Kim

Issue Date: 2007-11

Citation: Journal of Nanoscience and Nanotechnology, v.7 no.11, pp.4180-4184

ISSN: 1533-4880

Publisher: American Scientific Publishers (ASP)

Language: English

Type: Journal Article

KSP Keywords: Plasma-enhanced atomic layer deposition

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