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Conference Paper
A Study on the Physical and Electrical Properties of Indium Oxide/Zinc Oxide Heterostructured Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition
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- Authors
- Jeong-Mu Lee, Hwan-Jae Lee, Seung-Youl Kang, Seong-Deok Ahn
- Issue Date
- 2015-12
- Citation
- International Conference on Advanced Materials and Devices (ICAMD) 2015, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Electrical properties, Plasma-enhanced atomic layer deposition, Zinc Oxide(ZnO), indium oxide, thin film(TF)