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학술지 Rapid Vapor-Phase Fabrication of Organic-Inorganic Hybrid Superlattices with Monolayer Precision
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저자
이병훈, 유민기, 최성율, 이광현, 임성길, 성명모
발행일
200712
출처
Journal of the American Chemical Society, v.129 no.51, pp.16034-16041
ISSN
0002-7863
출판사
American Chemical Society(ACS)
DOI
https://dx.doi.org/10.1021/ja075664o
협약과제
07SB1300, 유기 전자소자용 유기 소재 개발, 최성율
초록
We report a new layer-by-layer growth method of self-assembled organic multilayer thin films based on gas-phase reactions. In the present molecular layer deposition (MLD) process, alkylsiloxane self-assembled multilayers (SAMs) were grown under vacuum by repeated sequential adsorptions of C= C-terminated alkylsilane and titanium hydroxide. The MLD method is a self- limiting layer-by-layer growth process, and is perfectly compatible with the atomic layer deposition (ALD) method. The SAMs films prepared exhibited good thermal and mechanical stability, and various unique electrical properties. The MLD method, combined with ALD, was applied to the preparation of organic-inorganic hybrid nanolaminate films in the ALD chamber. The organic-inorganic hybrid superlattices were then used as active mediums for two-terminal electrical bistable devices. The advantages of the MLD method with ALD include accurate control of film thickness, large-scale uniformity, highly conformai layering, sharp interfaces, and a vast library of possible materials. The MLD method with ALD is an ideal fabrication technique for various organic-inorganic hybrid superlattices. © 2007 American Chemical Society.
KSP 제안 키워드
Accurate control, Atomic Layer Deposition, Electrical bistable devices, Fabrication techniques, Gas-phase reactions, Growth method, Growth process, Layer-by-Layer(LbL), Layer-by-layer growth, Molecular layer deposition, Organic-inorganic hybrid