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Conference Paper
Growth Characteristics and Electrical Properties of Indium Oxide and Zinc Oxide Superlattice Thin Films by Plasma Enhanced Atomic Layer Deposition
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- Authors
- Jeong-Mu Lee, Seung-Youl Kang, Seong-Deok Ahn
- Issue Date
- 2015-09
- Citation
- Asian-European International Conference on Plasma Surface Engineering (AEPSE) 2015, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Growth characteristics, Plasma-enhanced atomic layer deposition, Superlattice thin films, Zinc oxide(ZnO), electrical properties(I-V curve), indium oxide, thin film(TF)