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학술지 A Dielectric Property Analysis of Ferroelectric Thin Film Using Terahertz Time-Domain Spectroscopy
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저자
류한철, 곽민환, 강승범, 정세영, 백문철, 강광용, 이수재, 문승언, 박성욱
발행일
200712
출처
Integrated Ferroelectrics, v.95 no.1, pp.83-91
ISSN
1058-4587
출판사
Taylor & Francis
DOI
https://dx.doi.org/10.1080/10584580701756573
협약과제
07MB1400, THz파 발진 변환 검출기 및 신호원, 강광용
초록
This paper presents complex dielectric properties of ferroelectric BSTO thin film, deposited on MgO substrate by pulsed laser deposition, in the frequency range of 0.5 - 3.0 THz using terahertz time-domain spectroscopy (THz-TDS). In order to extract complex dielectric properties of the thin film, multiple reflections within the thin film were considered and an error function between the calculated and measured data was introduced. The real part of the dielectric constant of the BSTO thin film was less than 170 and the dielectric loss tangent of the BSTO thin film varied between 0.9 and 3.0. All values of an error function were less than 7 x 10"4 in the measured frequency ranges. The analysis method using THz-TDS enables us to find out complex dielectric properties of ferroelectric thin film exactly.
KSP 제안 키워드
Analysis method, Dielectric Constant, Dielectric properties, Frequency Range, Measured frequency, MgO substrate, Multiple reflection, Pulsed-laser deposition(PLD), dielectric loss tangent, error function, ferroelectric thin film