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학술지 Nanocrystalline ZnO Film Layer on Silicon and its Application to Surface Acoustic Wave-Based Streaming
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이대식, Jikui Luo, Yongqing Fu, William i Milne, 박래만, 김상협, 정문연, 맹성렬
Journal of Nanoscience and Nanotechnology, v.8 no.9, pp.4626-4629
American Scientific Publishers (ASP)
06MB4700, 차세대 고성능 광전자소자 및 스마트 생화학 센서 구현을 위한 IT-BT-NT 융합 핵심기술 개발, 맹성렬
A surface acoustic wave (SAW) device consisting of 1-6 μm-thick ZnO thin films deposited on Si wafer was designed, fabricated, and characterized in this study. Photolithographic protocols for interdigitated transducers (IDTs) and surface modification using fluoroalkylsilane are employed with the aim of droplet-based microfluidic actuations in bio-microsystems. A ZnO thin film was grown on a 4?? silicon wafer with c-axis orientation, an average roughness of 11.6 nm, and a small grain size of 20 nm. It was found that the resonant frequencies (Rayleigh and Sezawa modes) of SAW devices move to a lower frequency range as the thickness of the ZnO thin films increases. Through the silane surface modification, a hydrophobic surface with a contact angle of 114째 was obtained. Finally, liquid streaming by acoustic wave was demonstrated by observing the actuation of SiO 2 microparticles in a microfluidic drop. Copyright © 2008 American Scientific Publishers All rights reserved.
KSP 제안 키워드
20 nm, Contact angle(CA), Frequency Range, Hydrophobic surface, Nanocrystalline ZnO, Resonant frequency(Fr), Si wafer, SiO 2, Silicon wafer, Small grain size, Surface acoustic wave (SAW) device