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Conference Paper
High Sensitivity and Low Power Consumption CO Gas Sensor based on In2O3 Nanowire
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- Authors
- J. H. Kwak, S. J. Park, E.-K. Kim, J. Park, H. Y. Lee, S. E. Moon, S. Maeng, K.-H. Park, J. Kim, G.-H. Jo, T.-H. Lee, D.-D. Lee, F. Udrea, W. I. Milne
- Issue Date
- 2008-02
- Citation
- 한국 반도체 학술 대회 (KCS) 2008, pp.1-3
- Language
- English
- Type
- Conference Paper
- Abstract
- In this paper, micro gas sensor is fabricated using indium oxide nanowire for effective gas detection and monitoring system.Nanowire has been many advantages as sensing material.Fabricated sensors are performed by the SEM, XRD and TEM. Gas response characteristics are examined for CO gas. Sensors are showed high sensitivities and stability for CO gas. And micro hot plate is showed low power consumption about 30 mW at 400℃.