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Journal Article SiO2/Si 및 Si 기판에 RF Magnetron Sputtering 법으로 증착된 적외선 센서용 La0.7Sr0.3MnO3 CMR 박막
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Authors
최선규, Sivasankar Reddy, 유병곤, 류호준, 박형호
Issue Date
2008-03
Citation
한국진공학회지, v.17, no.2, pp.130-137
ISSN
1225-8822
Publisher
한국진공학회
Language
Korean
Type
Journal Article
DOI
https://dx.doi.org/10.5757/JKVS.2008.17.2.130
KSP Keywords
rf Magnetron sputtering