상세정보
학술지
Optical Constants of Evaporated Gold Films Measured by Surface Plasmon Resonance at Telecommunication Wavelengths
- 발행일
- 200804
- 출처
- Journal of Applied Physics, v.103 no.7, pp.1-5
- ISSN
- 0021-8979
- 출판사
- American Institute of Physics(AIP)
- 협약과제
- 08MB2200, 휴대 단말기용 나노 플렉시블 광전배선 모듈, 주정진
- 초록
- We report the first measurement of the optical constants of evaporated gold films by using the surface plasmon resonance curve fitting method with an attenuated total reflection device from 16 to 70 nm thickness at telecommunication wavelengths. The results that were obtained by surface plasmon resonance measurement are in good agreement with those obtained by ellipsometry. Until now, optical constants of thin metal films are known to change according to the thickness due to the variation of the electrical resistivity. This phenomenon is also verified in this study by a simple surface plasmon resonance measurement. It is observed that for the gold films of thicknesses of less than 20 nm, the real part of the refractive index increases and the imaginary part decreases with decreasing film thickness. © 2008 American Institute of Physics.
- KSP 제안 키워드
- 20 nm, Curve fitting method, Evaporated gold, Gold films, Imaginary part, Resonance curve, Surface Plasmon resonance, Surface plasmon(SP), Thin metal films, attenuated total reflection, electrical resistivity