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Conference Paper Electrical Stability of ZnO TFT during Gate-Bias Stress
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Authors
Tae-Hyun Kim, Sho-Yeon Kim, Jae-Hong Jeon, Hee-Hwan Choe, Kang-Woong Lee, Jong-Hyun Seo, Jae-Heon Shin, Sang-Hee Ko Park, Chi-Sun Hwang
Issue Date
2008-05
Citation
Society for Information Display (SID) International Symposium 2008, pp.1250-1253
Language
English
Type
Conference Paper
DOI
https://dx.doi.org/10.1889/1.3069364
Project Code
08MB2100, Smart window with transparent electronic devices, Cho Kyoung Ik
Abstract
We fabricated TFTs with ZnO thin film as an active layer. Electrical bias stress test of ZnO TFT was also carried out. The results of stress test of ZnO TFT differed from those of a-Si:H TFT. Therefore, the instability of ZnO TFT cannot be explained by conventional degradation mechanisms of a-Si:H TFT. The variance of some factors in the fabrication process showed a certain trend in the results of bias stress. A possible mechanism of abnormal behavior under the gate bias stress was discussed. © 2008 SID.
KSP Keywords
Abnormal behavior, Active Layer, Electrical stability, Gate bias stress, Possible mechanism, Stress test, ZnO thin films, a-Si:H TFT, degradation mechanism, electrical bias, fabrication process