상세정보
학술지
졸-겔법으로 증착된 ZnO 나노 막대를 이용한 고감도 이산화질소 가스 센서 제작 및 특성 연구
- 발행일
- 200803
- 출처
- 센서학회지, v.17 no.2, pp.147-150
- ISSN
- 1225-5475
- 출판사
- 한국센서학회
- 협약과제
- 08MB1800, 유비쿼터스 단말용 부품 모듈, 김종대
- 초록
- Multiple ZnO nanorod device detecting NO2 gas was fabricated by sol-gel growth method and gas responsecharacteristics were measured as a chemical gas sensor. The device is mainly composed of sensing electrode and sensingnano material. To acquire high sensitivity of the device for NO2 gas it was heated by a heat chuck up to 400oC. Thesensing part was easily made using the CMOS compatible process, for example, the large area and low temperature nanomaterial growth process, etc. The sensors were successfully demonstrated and showed high sensitive response for NO2gas sensing.
- KSP 제안 키워드
- CMOS compatible process, Chemical gas sensor, Gas sensing, Growth method, Growth process, High Sensitivity, High sensitive, Low temperature(LT), Sensing electrodes, Sensitive response, Sol-gel growth