상세정보
학술지
Multichannel Silicon WDM Ring Filters Fabricated with DUV Lithography
- 발행일
- 200809
- 출처
- Optics Communications, v.281 no.17, pp.4302-4306
- ISSN
- 0030-4018
- 출판사
- Elsevier
- 협약과제
- 07MB1500, 실리콘 기반 초고속 광인터커넥션 IC, 김경옥
- 초록
- We have fabricated 9-channel silicon wavelength-division-multiplexing (WDM) ring filters using 193 nm deep-ultraviolet (DUV) lithography and investigated the spectral properties of the ring filters by comparing the transmission spectra with and without an upper cladding. The average channel-spacing of the 9-channel WDM ring filter with a polymeric upper cladding is measured about 1.86 nm with the standard deviation of the channel-spacing about 0.34 nm. The channel crosstalk is about -30 dB, and the minimal drop loss is about 2 dB. © 2008 Elsevier B.V. All rights reserved.
- KSP 제안 키워드
- 193 nm, Channel crosstalk, Spectral properties, Standard deviation(STD), Transmission spectra, Wavelength Division Multiplexing(WDM), deep-ultraviolet (DUV) lithography, ring filter