상세정보
학술지
글루코오스 농도 측정을 위한 볼로미터 타입의 적외선 센서 제작
- 발행일
- 200807
- 출처
- 센서학회지, v.17 no.4, pp.250-255
- ISSN
- 1225-5475
- 출판사
- 한국센서학회
- 협약과제
- 08MB1300, IT융복합 공동시험환경구축, 강진영
- 초록
- A vanadium pentoxide (V2O5)-based bolometric infrared (IR) sensor has been designed and fabricated using microelectro mechanical systems (MEMS) technology for glucose detection and its resistive characteristics has been illustrated.The proposed bolometric infrared sensor is composed of the vanadium pentoxide array that shows superior temperaturecoefficient of resistance (TCR) and standard silicon micromachining compatibility. In order to achieve the bestperformance, deposited V2O5 thin film is optimized by adequate rapid thermal annealing (RTA) process. Annealedvanadium oxide thin film has demonstrated a linear characteristic and relatively high TCR value (?4 %/oC). The resistanceof vanadium oxide is changed by IR intensity based on glucose concentration.
- KSP 제안 키워드
- Glucose detection, IR intensity, Infrared (IR) sensor, Infrared sensor, Linear characteristic, Micro-electro-mechanical system(MEMS), Oxide thin films, Silicon micromachining, Vanadium oxide, glucose concentration, intensity based