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글루코오스 농도 측정을 위한 볼로미터 타입의 적외선 센서 제작
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- Issue Date
- 2008-07
- Citation
- 센서학회지, v.17, no.4, pp.250-255
- ISSN
- 1225-5475
- Publisher
- 한국센서학회
- Language
- Korean
- Type
- Journal Article
- Abstract
- A vanadium pentoxide (V2O5)-based bolometric infrared (IR) sensor has been designed and fabricated using micro electro mechanical systems (MEMS) technology for glucose detection and its resistive characteristics has been illustrated. The proposed bolometric infrared sensor is composed of the vanadium pentoxide array that shows superior temperature coefficient of resistance (TCR) and standard silicon micromachining compatibility. In order to achieve the best performance, deposited V2O5 thin film is optimized by adequate rapid thermal annealing (RTA) process. Annealed vanadium oxide thin film has demonstrated a linear characteristic and relatively high TCR value (−4 %/oC). The resistance of vanadium oxide is changed by IR intensity based on glucose concentration.
- KSP Keywords
- Best performance, Glucose detection, IR intensity, Infrared (IR) sensor, Infrared sensor, Linear characteristic, Micro-electro-mechanical system(MEMS), Silicon micromachining, Vanadium oxide thin film, glucose concentration, intensity based