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구분 SCI
연도 ~ 키워드

상세정보

학술지 글루코오스 농도 측정을 위한 볼로미터 타입의 적외선 센서 제작
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저자
최주찬, 정호, 박건식, 박종문, 구진근, 강진영, 공성호
발행일
200807
출처
센서학회지, v.17 no.4, pp.250-255
ISSN
1225-5475
출판사
한국센서학회
DOI
https://dx.doi.org/10.5369/JSST.2008.17.4.250
협약과제
08MB1300, IT융복합 공동시험환경구축, 강진영
초록
A vanadium pentoxide (V2O5)-based bolometric infrared (IR) sensor has been designed and fabricated using microelectro mechanical systems (MEMS) technology for glucose detection and its resistive characteristics has been illustrated.The proposed bolometric infrared sensor is composed of the vanadium pentoxide array that shows superior temperaturecoefficient of resistance (TCR) and standard silicon micromachining compatibility. In order to achieve the bestperformance, deposited V2O5 thin film is optimized by adequate rapid thermal annealing (RTA) process. Annealedvanadium oxide thin film has demonstrated a linear characteristic and relatively high TCR value (?4 %/oC). The resistanceof vanadium oxide is changed by IR intensity based on glucose concentration.
KSP 제안 키워드
Glucose detection, IR intensity, Infrared (IR) sensor, Infrared sensor, Intensity-based, Linear characteristic, Micro-electro-mechanical system(MEMS), Oxide thin films, Silicon micromachining, Vanadium oxide, glucose concentration