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Conference Paper
VO2 and V2O3 Films Fabricated on (1000) or (1010)Al2O3 by Reactive RF-Magnetron Sputter Deposition and Annealing Processes
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- Authors
- Sun Jin Yun, Jung Wook Lim, Jong-Su Noh, Bong-Jun Kim, Hyun-Tak Kim
- Issue Date
- 2008-09
- Citation
- International Conference on Solid State Devices and Materials (SSDM) 2008, pp.1-2
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- RF-magnetron sputter deposition, annealing process