상세정보
학술지
SOI CMOS-Based Smart Gas Sensor System for Ubiquitous Sensor Networks
- 저자
- 맹성렬, Prasanta Guha, Florin Udrea, Syed Z. Ali, Sumita Santra, Julian Gardner, 박종혁, 김상협, 문승언, 박강호, 김종대, Youn Gjin Choi, William I. Milne
- 발행일
- 200810
- 출처
- ETRI Journal, v.30 no.4, pp.516-525
- ISSN
- 1225-6463
- 출판사
- 한국전자통신연구원 (ETRI)
- 초록
- This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at 200°C and showed a good response to 100 ppb NO2gas.
- KSP 제안 키워드
- CMOS circuits, Compact design, Design of the platform, Fully integrated, High Temperature, Micro-hotplate(MHP), SOI CMOS, Sensing element, Sensor system, Signal Processing, Silicon-on-insulator (SOI) technology