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Journal Article
SOI CMOS-Based Smart Gas Sensor System for Ubiquitous Sensor Networks
- Authors
- Sung Lyul Maeng, Prasanta Guha, Florin Udrea, Syed Z. Ali, Sumita Santra, Julian Gardner, Jong Hyurk Park, Sang Hyeob Kim, Seung Eon Moon, Kang Ho Park, Jong Dae Kim, Youn Gjin Choi, William I. Milne
- Issue Date
- 2008-10
- Citation
- ETRI Journal, v.30, no.4, pp.516-525
- ISSN
- 1225-6463
- Publisher
- 한국전자통신연구원 (ETRI)
- Language
- English
- Type
- Journal Article
- Abstract
- This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at 200°C and showed a good response to 100 ppb NO2gas.
- KSP Keywords
- CMOS circuits, Compact design, Design of the platform, High Temperature, Hydrothermal process, Low Power consumption, Micro-hotplate(MHP), SOI CMOS, Sensing elements, Sensor system, Signal Processing