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Conference Paper Novel Oxide Thin Film Transistors for Transparent AMOLED
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Authors
Doo-Hee Cho, Shin Hyuk Yang, Chun Won Byun, Jeong Ik Lee, Chi-Sun Hwang, Sang-Hee Ko Park, Hye-Yong Chu, Kyoung Ik Cho
Issue Date
2008-10
Citation
International Meeting on Information Display (IMID) 2008, pp.1101-1104
Language
English
Type
Conference Paper
Project Code
08MB2100, Smart window with transparent electronic devices, Cho Kyoung Ik
Abstract
We have fabricated the transparent TFTs using new oxide material (AZTO: Al-doped zinc tin oxide) as an active layer. The AZTO TFT showed good performance without post-annealing. The electrical characteristics were improved by the post-annealing up to 300 °C. The AZTO TFTs exhibited a mobility of 8~12 cm2/Vs, a subthreshold swing of 0.2~0.6 V/dec, and an on/off ratio of more than 109.
KSP Keywords
Active Layer, Al-doped, Oxide material, Oxide thin films, Post-annealing, Thin-Film Transistor(TFT), Zinc tin oxide, electrical characteristics, on/off ratio, subthreshold swing(SS), thin film(TF)