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학술대회 Sensitivity Tunable Capacitive Type Micro Accelerometer
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제창한, 이성식, 이명래, 정성혜, 이아라, 황건, 유병곤, 최창억
SENSORS 2008, pp.1020-1023
08MB1900, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발, 최창억
In this paper, we present a novel sensitivity tunable capacitive type micro accelerometer which could adjust its sensitivity. The previous bulk-micromachined accelerometer is hard to make a pattern which is smaller than 1um with high aspect ratio because of ICP etching errors such as loading effect and footing. In this paper, by making movable ground electrodes which have MEMS actuators, we present a high sensitivity micro accelerometer with a narrow sensing gap under 1um using conventional bulk micromachining. Unlike previous capacitive type MEMS accelerometers which have anchored ground electrodes, the proposed micro accelerometer has movable ground electrodes. By simply applying DC bias to MEMS actuators, the ground electrodes are moved to the sensing electrodes. The fabricated sensing gap is 1.9um and it could be reduced to 0.8um according to the actuation voltage, VDD. The working sensitivity of the micro accelerometer is 0.410 pF/g at VDD=1.0 V, which is higher than 0.125 pF/g with no actuation, VDD=0 V. © 2008 IEEE.
KSP 제안 키워드
Actuation Voltage, Bulk Micromachining, Bulk-micromachined, Capacitive-type, High Sensitivity, High aspect ratio, ICP etching, Loading effect, MEMS accelerometers, MEMS actuators, Micro accelerometer