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Sensitivity Tunable Capacitive Type Micro Accelerometer
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- Authors
- Chang Han Je, Sung Sik Lee, Myung Lae Lee, Sung Hae Jung, Ah Ra Lee, Gunn Hwang, Byoung Gon Yu, Chang Auck Choi
- Issue Date
- 2008-10
- Citation
- SENSORS 2008, pp.1020-1023
- Language
- English
- Type
- Conference Paper
- Abstract
- In this paper, we present a novel sensitivity tunable capacitive type micro accelerometer which could adjust its sensitivity. The previous bulk-micromachined accelerometer is hard to make a pattern which is smaller than 1um with high aspect ratio because of ICP etching errors such as loading effect and footing. In this paper, by making movable ground electrodes which have MEMS actuators, we present a high sensitivity micro accelerometer with a narrow sensing gap under 1um using conventional bulk micromachining. Unlike previous capacitive type MEMS accelerometers which have anchored ground electrodes, the proposed micro accelerometer has movable ground electrodes. By simply applying DC bias to MEMS actuators, the ground electrodes are moved to the sensing electrodes. The fabricated sensing gap is 1.9um and it could be reduced to 0.8um according to the actuation voltage, VDD. The working sensitivity of the micro accelerometer is 0.410 pF/g at VDD=1.0 V, which is higher than 0.125 pF/g with no actuation, VDD=0 V. © 2008 IEEE.
- KSP Keywords
- Actuation Voltage, Bulk micromachining, Bulk-micromachined, Capacitive-type, High Aspect Ratio, High Sensitivity, ICP etching, Loading effect, MEMS accelerometers, MEMS actuators, Micro accelerometer